Assignee
WONIK QNC CORP
KR·2 granted patents·6 pending applications·0 citations·filing 2018–2025
Top patents by PatentIndex Score
8 records- 0161US2025305123A1Method and apparatus for forming protective fluoride layer on part having gas flow passage for semiconductor deposition apparatusWONIK QNC CORP·Filed 2025·Application pending·0 cites
- 0260US2025316464A1Fluorination cleaning device for cleaning showerhead-type part for semiconductor dry etching system and fluorination cleaning apparatus including the sameWONIK QNC CORP·Filed 2025·Application pending·0 cites
- 0350US2025316465A1Fluorination cleaning device for cleaning liner-type part semiconductor dry etching system and fluorination cleaning apparatus including the sameWONIK QNC CORP·Filed 2025·Application pending·0 cites
- 0450US2024363328A1METHOD AND APPARATUS FOR DRY-CLEANING AlN HEATER FOR SEMICONDUCTOR FABRICATION EQUIPMENTWONIK QNC CORP·Filed 2024·Application pending·0 cites
- 0549US2025308866A1Fluorination cleaning method and apparatus for forming yttrium oxyfluoride on yttria-coated part for semiconductor dry etching systemWONIK QNC CORP·Filed 2025·Application pending·0 cites
- 0642US2023131168A1Processing method for fluorination of fluorination-target component and fluorinated component obtained therebyWONIK QNC CORP·Filed 2022·Application pending·0 cites
- 0740US11898254B2Processing method for fluorination of fluorination-target component for semiconductor fabrication equipment, which minimizes generation of contaminant particles, and fluorinated component obtained therebyWONIK QNC CORP·Filed 2022·Granted Feb 13, 2024·0 cites·12 claims
- 0838US11872104B2Implant surface modification treatment deviceWONIK QNC CORP·Filed 2018·Granted Jan 16, 2024·0 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when WONIK QNC CORP files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →