Assignee
WIRELESS MEMS INC
US·6 granted patents·73 citations·filing 2004–2006
Top patents by PatentIndex Score
6 records- 0178US7101724B2Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formationWIRELESS MEMS INC·Filed 2004·Granted Sep 5, 2006·17 cites·7 claims
- 0278US6962832B2Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switchWIRELESS MEMS INC·Filed 2004·Granted Nov 8, 2005·26 cites·9 claims
- 0374US7545234B2Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereofWIRELESS MEMS INC·Filed 2006·Granted Jun 9, 2009·6 cites·1 claims
- 0473US7230513B2Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switchWIRELESS MEMS INC·Filed 2004·Granted Jun 12, 2007·12 cites·10 claims
- 0570US7352266B2Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switchWIRELESS MEMS INC·Filed 2004·Granted Apr 1, 2008·12 cites·2 claims
- 0639US7466215B2Balanced MEMS switch for next generation communication systemsWIRELESS MEMS INC·Filed 2006·Granted Dec 16, 2008·0 cites·24 claims
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