Assignee
WILLIAMSON DAVID M
US·4 granted patents·2 pending applications·128 citations·filing 1988–2010
Top patents by PatentIndex Score
6 records- 0194US4953960AOptical reduction systemWILLIAMSON DAVID M·Filed 1988·Granted Sep 4, 1990·113 cites·15 claims
- 0285US8705170B2High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locationsWILLIAMSON DAVID M·Filed 2009·Granted Apr 22, 2014·15 cites·14 claims
- 0353US8305559B2Exposure apparatus that utilizes multiple masksWILLIAMSON DAVID M·Filed 2009·Granted Nov 6, 2012·0 cites·32 claims
- 0448US8317344B2High NA annular field catoptric projection optics using Zernike polynomial mirror surfacesWILLIAMSON DAVID M·Filed 2010·Granted Nov 27, 2012·0 cites·21 claims
- 0540US2011299056A1System and Method Configured to Provide Predetermined Depth Of Focus and to Control Irradiance DistributionWILLIAMSON DAVID M·Filed 2010·Application pending·0 cites
- 0639US2006158615A1Catadioptric 1x projection system and methodWILLIAMSON DAVID M·Filed 2005·Application pending·0 cites
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