Assignee

WI SOON-IM

KR·2 granted patents·21 citations·filing 2004–2007

Technology mixH01J1 H01L1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0182US9054146B2Substrate transfer equipment and high speed substrate processing system using the sameWI SOON-IM·Filed 2007·Granted Jun 9, 2015·11 cites·31 claims
0269US8409400B2Inductive plasma chamber having multi discharge tube bridgeWI SOON-IM·Filed 2004·Granted Apr 2, 2013·10 cites·12 claims

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