Assignee
WESTERBERG GERHARD
3 granted patents·60 citations·filing 1976–1981
Top patents by PatentIndex Score
3 records- 0189US4226024ACaliperWESTERBERG GERHARD·Filed 1979·Granted Oct 7, 1980·52 cites·6 claims
- 0235US4465350AMethod and device for inspecting micromask patternsWESTERBERG GERHARD·Filed 1981·Granted Aug 14, 1984·6 cites·6 claims
- 0325US4060816AScanning apparatus, for producing masks for micro circuitsWESTERBERG GERHARD·Filed 1976·Granted Nov 29, 1977·2 cites·3 claims
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