Assignee
WANG CHUN-MING
US·4 granted patents·2 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0165US8076056B2Method of making sub-resolution pillar structures using undercutting techniqueWANG CHUN-MING·Filed 2008·Granted Dec 13, 2011·2 cites·26 claims
- 0247US8394656B2Method of creating MEMS device cavities by a non-etching processWANG CHUN-MING·Filed 2010·Granted Mar 12, 2013·0 cites·15 claims
- 0343US8221943B2Photomask with assist featuresWANG CHUN-MING·Filed 2010·Granted Jul 17, 2012·0 cites·25 claims
- 0436US8465906B2Method and mask for enhancing the resolution of patterning 2-row holesWANG CHUN-MING·Filed 2011·Granted Jun 18, 2013·0 cites·10 claims
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