Assignee
WALTHER JONAS
SE·3 granted patents·3 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0151US8314941B2Cartesian coordinate measurement for rotating systemWALTHER JONAS·Filed 2009·Granted Nov 20, 2012·3 cites·23 claims
- 0236US8467117B2Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noiseWALTHER JONAS·Filed 2010·Granted Jun 18, 2013·0 cites·39 claims
- 0333US8488105B2Multi-table lithographic systems, lithography processing tools and methods for processing workpiecesWALTHER JONAS·Filed 2010·Granted Jul 16, 2013·0 cites·18 claims
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