Assignee
WALSH PHILLIP
US·3 granted patents·4 pending applications·3 citations·filing 2007–2012
Top patents by PatentIndex Score
7 records- 0176US8867041B2Optical vacuum ultra-violet wavelength nanoimprint metrologyWALSH PHILLIP·Filed 2012·Granted Oct 21, 2014·3 cites·14 claims
- 0254US2009219537A1Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengthsWALSH PHILLIP·Filed 2008·Application pending·0 cites
- 0353US2008129986A1Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientationsWALSH PHILLIP·Filed 2007·Application pending·0 cites
- 0451US8773662B2Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopyWALSH PHILLIP·Filed 2011·Granted Jul 8, 2014·0 cites·17 claims
- 0550US2012170021A1Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sampleWALSH PHILLIP·Filed 2009·Application pending·0 cites
- 0645US2008246951A1Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-piecesWALSH PHILLIP·Filed 2008·Application pending·0 cites
- 0740US8564780B2Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work piecesWALSH PHILLIP·Filed 2010·Granted Oct 22, 2013·0 cites·26 claims
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