Assignee
WALLACE JAY R
US·3 granted patents·21 citations·filing 2008–2008
Top patents by PatentIndex Score
3 records- 0187US8303716B2High throughput processing system for chemical treatment and thermal treatment and method of operatingWALLACE JAY R·Filed 2008·Granted Nov 6, 2012·12 cites·20 claims
- 0275US8287688B2Substrate support for high throughput chemical treatment systemWALLACE JAY R·Filed 2008·Granted Oct 16, 2012·5 cites·20 claims
- 0372US8323410B2High throughput chemical treatment system and method of operatingWALLACE JAY R·Filed 2008·Granted Dec 4, 2012·4 cites·20 claims
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