Assignee
VTI TECHNOLOGIES OY
FI·16 granted patents·215 citations·filing 2002–2007
Top patents by PatentIndex Score
16 records- 0195US7426863B2Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensorVTI TECHNOLOGIES OY·Filed 2006·Granted Sep 23, 2008·30 cites·18 claims
- 0293US7982291B2Method for manufacturing a microelectromechanical component, and a microelectromechanical componentVTI TECHNOLOGIES OY·Filed 2006·Granted Jul 19, 2011·21 cites·101 claims
- 0391US7454971B2Oscillating micro-mechanical sensor of angular velocityVTI TECHNOLOGIES OY·Filed 2005·Granted Nov 25, 2008·32 cites·23 claims
- 0487US7555950B2Capacitive sensor and a method for manufacturing the capacitive sensorVTI TECHNOLOGIES OY·Filed 2005·Granted Jul 7, 2009·21 cites·47 claims
- 0583US7398683B2Capacitive acceleration sensorVTI TECHNOLOGIES OY·Filed 2004·Granted Jul 15, 2008·36 cites·13 claims
- 0677US7325451B2Oscillating micro-mechanical sensor of angular velocityVTI TECHNOLOGIES OY·Filed 2005·Granted Feb 5, 2008·11 cites·11 claims
- 0772US7516038B2Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensorVTI TECHNOLOGIES OY·Filed 2006·Granted Apr 7, 2009·11 cites·15 claims
- 0866US7962309B2Method and device for measuring the progress of a moving personVTI TECHNOLOGIES OY·Filed 2007·Granted Jun 14, 2011·7 cites·37 claims
- 0966US7682861B2Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensorVTI TECHNOLOGIES OY·Filed 2006·Granted Mar 23, 2010·2 cites·12 claims
- 1066US6938485B2Capacitive acceleration sensorVTI TECHNOLOGIES OY·Filed 2004·Granted Sep 6, 2005·13 cites·13 claims
- 1164US7932568B2Microelectromechanical componentVTI TECHNOLOGIES OY·Filed 2006·Granted Apr 26, 2011·5 cites·104 claims
- 1262US7252007B2Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensorVTI TECHNOLOGIES OY·Filed 2005·Granted Aug 7, 2007·8 cites·12 claims
- 1358US6998059B2Method for manufacturing a silicon sensor and a silicon sensorVTI TECHNOLOGIES OY·Filed 2002·Granted Feb 14, 2006·7 cites·15 claims
- 1452US7340955B2Capacitive acceleration sensor arrangementVTI TECHNOLOGIES OY·Filed 2004·Granted Mar 11, 2008·8 cites·25 claims
- 1542US7716983B2Capacitive acceleration sensorVTI TECHNOLOGIES OY·Filed 2004·Granted May 18, 2010·3 cites·3 claims
- 1634US7302857B2Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor constructionVTI TECHNOLOGIES OY·Filed 2003·Granted Dec 4, 2007·0 cites·11 claims
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