Assignee
VISTEC SEMICONDUCTOR SYS GMBH
DE·51 granted patents·32 pending applications·309 citations·filing 2002–2010
Top patents by PatentIndex Score
83 records- 0190US7247825B2Method and apparatus for scanning a specimen using an optical imaging systemVISTEC SEMICONDUCTOR SYS GMBH·Filed 2003·Granted Jul 24, 2007·51 cites·21 claims
- 0287US7420670B2Measuring instrument and method for operating a measuring instrument for optical inspection of an objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Sep 2, 2008·10 cites·18 claims
- 0386US7460219B2Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offsetVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Dec 2, 2008·18 cites·17 claims
- 0485US7826068B2Method for correcting measured values resulting from the bending of a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Nov 2, 2010·12 cites·13 claims
- 0583US7903259B2Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 8, 2011·5 cites·22 claims
- 0682US7248354B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Jul 24, 2007·21 cites·27 claims
- 0779US7548321B2Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Granted Jun 16, 2009·10 cites·9 claims
- 0878US7489394B2Apparatus for inspecting a disk-like objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Feb 10, 2009·6 cites·4 claims
- 0977US7694426B2Method for eliminating sources of error in the system correction of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Apr 13, 2010·9 cites·10 claims
- 1077US7268867B2Apparatus and method for inspecting a semiconductor componentVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Sep 11, 2007·6 cites·18 claims
- 1177US7224446B2Apparatus, method, and computer program for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted May 29, 2007·15 cites·24 claims
- 1276US7477370B2Method of detecting incomplete edge bead removal from a disk-like objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jan 13, 2009·6 cites·11 claims
- 1375US7327450B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Feb 5, 2008·12 cites·23 claims
- 1474US7657077B2Detecting defects by three-way die-to-die comparison with false majority determinationVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Feb 2, 2010·8 cites·5 claims
- 1573US7602481B2Method and apparatus for inspecting a surfaceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Granted Oct 13, 2009·3 cites·19 claims
- 1673US7382450B2Method of detecting an edge bead removal line on a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jun 3, 2008·4 cites·9 claims
- 1771US7450246B2Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one directionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Nov 11, 2008·8 cites·20 claims
- 1870US7823295B2Method for calibration of a measuring table of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2010·Granted Nov 2, 2010·3 cites·8 claims
- 1970US7193699B2Method and apparatus for scanning a semiconductor waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Mar 20, 2007·9 cites·17 claims
- 2069US7528960B2Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Granted May 5, 2009·10 cites·15 claims
- 2169US7292328B2Method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Nov 6, 2007·8 cites·18 claims
- 2267US7768637B2Method for acquiring high-resolution images of defects on the upper surface of the wafer edgeVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Aug 3, 2010·6 cites·18 claims
- 2367US7551296B2Method for determining the focal position of at least two edges of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 23, 2009·5 cites·13 claims
- 2467US7545489B2Apparatus and method of inspecting the surface of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jun 9, 2009·2 cites·14 claims
- 2566US7265823B2System for the detection of macrodefectsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Sep 4, 2007·14 cites·12 claims
- 2662US7654007B2Method for improving the reproducibility of a coordinate measuring apparatus and its accuracyVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Feb 2, 2010·4 cites·12 claims
- 2760US7307713B2Apparatus and method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Dec 11, 2007·3 cites·20 claims
- 2858US7906978B2Device for measuring or inspecting substrates of the semiconductor industryVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 15, 2011·2 cites·17 claims
- 2958US7675633B2Method for measuring positions of structures on a substrate with a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 9, 2010·5 cites·7 claims
- 3057US7584072B2Method for determining correction values for the measured values of positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Sep 1, 2009·5 cites·6 claims
- 3156US7889338B2Coordinate measuring machine and method for structured illumination of substratesVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Feb 15, 2011·2 cites·15 claims
- 3256US7769556B2Method for correcting measuring errors caused by the lens distortion of an objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Aug 3, 2010·2 cites·8 claims
- 3356US7268940B2Illuminating deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2002·Granted Sep 11, 2007·5 cites·15 claims
- 3455US7986409B2Method for determining the centrality of masksVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 26, 2011·2 cites·14 claims
- 3555US7680616B2Method for correcting an error of the imaging system of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 16, 2010·2 cites·9 claims
- 3651US7939789B2Method for reproducibly determining geometrical and/or optical object characteristicsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 10, 2011·0 cites·15 claims
- 3751US7387859B2Method for measuring overlay shiftVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Jun 17, 2008·6 cites·19 claims
- 3849US7973931B2Method for determining the position of the edge bead removal line of a disk-like objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 5, 2011·3 cites·18 claims
- 3947US7978340B2System and method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 12, 2011·1 cites·7 claims
- 4047US7961334B2Coordinate measuring machine for measuring structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 14, 2011·0 cites·5 claims
- 4147US2008144025A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 4247US2008144014A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 4346US7982950B2Measuring system for structures on a substrate for semiconductor manufactureVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 19, 2011·1 cites·8 claims
- 4446US2008062415A1Method of optically inspecting and visualizing optical measuring values obtained from disk-like objectsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 4546US2010060883A1Apparatus and method for determining the focus positionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 4646US2009279080A1Device and method for the inspection of defects on the edge region of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 4745US2006279729A1Method of inspecting semiconductor wafers taking the SAW design into accountVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 4845US2009034832A1Device and method for scanning the whole surface of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 4944US7424393B2Wafer inspection deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Sep 9, 2008·2 cites·13 claims
- 5044US2007298951A1Wafer handling deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
Showing the top 50 of 83 patent records by PatentIndex Score.
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