Assignee
VEECO PRECISION SURFACE PROC LLC
US·12 granted patents·5 pending applications·9 citations·filing 2014–2019
Top patents by PatentIndex Score
17 records- 0177US10559488B2Two-level tape frame rinse assemblyVEECO PRECISION SURFACE PROC LLC·Filed 2017·Granted Feb 11, 2020·3 cites·14 claims
- 0273US10413850B2Apparatus and method to remove solids from material lift off post process solventsVEECO PRECISION SURFACE PROC LLC·Filed 2018·Granted Sep 17, 2019·3 cites·20 claims
- 0371US9870928B2System and method for updating an arm scan profile through a graphical user interfaceVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted Jan 16, 2018·2 cites·27 claims
- 0467US10553502B2Two etch method for achieving a wafer thickness profileVEECO PRECISION SURFACE PROC LLC·Filed 2018·Granted Feb 4, 2020·1 cites·17 claims
- 0557US2019168178A1Apparatus and Method for Mixing Fluids with Degradational PropertiesVEECO PRECISION SURFACE PROC LLC·Filed 2019·Application pending·0 cites
- 0651US10239031B2Apparatus and method for mixing fluids with degradational propertiesVEECO PRECISION SURFACE PROC LLC·Filed 2016·Granted Mar 26, 2019·0 cites·18 claims
- 0747US10294132B2Apparatus and method to reduce and control resistivity of deionized waterVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted May 21, 2019·0 cites·19 claims
- 0844US10026660B2Method of etching the back of a wafer to expose TSVsVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted Jul 17, 2018·0 cites·32 claims
- 0943US10443943B2Apparatus and method to control properties of fluid discharge via refrigerative exhaustVEECO PRECISION SURFACE PROC LLC·Filed 2017·Granted Oct 15, 2019·0 cites·16 claims
- 1043US10022745B2Apparatus for dual speed spin chuckVEECO PRECISION SURFACE PROC LLC·Filed 2014·Granted Jul 17, 2018·0 cites·21 claims
- 1142US10503182B2Apparatus and method for metals free reduction and control of resistivity of deionized waterVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted Dec 10, 2019·0 cites·24 claims
- 1241US10541180B2Apparatus and method for wafer thinning in advanced packaging applicationsVEECO PRECISION SURFACE PROC LLC·Filed 2018·Granted Jan 21, 2020·0 cites·31 claims
- 1340US2019385890A1Apparatus for supporting and maneuvering wafersVEECO PRECISION SURFACE PROC LLC·Filed 2019·Application pending·0 cites
- 1437US2019139790A1Dispensing arm head having point of dispense recirculation modeVEECO PRECISION SURFACE PROC LLC·Filed 2018·Application pending·0 cites
- 1535US10446387B2Apparatus and method to control etch rate through adaptive spiking of chemistryVEECO PRECISION SURFACE PROC LLC·Filed 2017·Granted Oct 15, 2019·0 cites·23 claims
- 1635US2018036752A1High Velocity Spray (HVS) Dispense Arm Assemblies including a Gas Shield NozzleVEECO PRECISION SURFACE PROC LLC·Filed 2017·Application pending·0 cites
- 1734US2018308741A1Configurable high temperature chuck for use in a semiconductor wafer processing systemVEECO PRECISION SURFACE PROC LLC·Filed 2018·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →