Assignee
VAN INGEN SCHENAU KOEN
NL·2 granted patents·12 citations·filing 2004–2010
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0190US9052605B2Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameterVAN INGEN SCHENAU KOEN·Filed 2010·Granted Jun 9, 2015·10 cites·25 claims
- 0237US8304180B2Lithographic apparatus and device manufacturing methodVAN INGEN SCHENAU KOEN·Filed 2004·Granted Nov 6, 2012·2 cites·21 claims
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