Assignee
VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS
NL·4 granted patents·9 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0190US8570492B2Lithographic apparatusVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2012·Granted Oct 29, 2013·6 cites·20 claims
- 0274US8730485B2Lithographic apparatus and device manufacturing methodVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2010·Granted May 20, 2014·3 cites·14 claims
- 0351US9316928B2Stage apparatus, lithographic apparatus and method of positioning an object tableVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2011·Granted Apr 19, 2016·0 cites·21 claims
- 0443US8400617B2Lithographic apparatus having a substrate support with open cell plastic foam partsVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2010·Granted Mar 19, 2013·0 cites·17 claims
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