Assignee
VAN DEN BRINK MARINUS AART
NL·3 granted patents·17 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0192USRE44446EDual stage lithographic apparatus and device manufacturing methodVAN DEN BRINK MARINUS AART·Filed 2012·Granted Aug 20, 2013·6 cites·34 claims
- 0291USRE43576EDual stage lithographic apparatus and device manufacturing methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 14, 2012·10 cites·33 claims
- 0360US8248583B2Lithographic apparatus and calibration methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 21, 2012·1 cites·18 claims
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