Assignee
UVAT TECH CO LTD
TW·0 granted patents·3 pending applications·0 citations·filing 2023–2023
Technology mixH01J3
Top patents by PatentIndex Score
3 records- 0154US2025046574A1Continuous processing mechanism for dual effect plasma etchingUVAT TECH CO LTD·Filed 2023·Application pending·0 cites
- 0253US2025125127A1Continuous plasma processing system with adjustable electrodeUVAT TECH CO LTD·Filed 2023·Application pending·0 cites
- 0353US2025125121A1Two-electrode continuous plasma processing systemUVAT TECH CO LTD·Filed 2023·Application pending·0 cites
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