Assignee
USUI YOSHIYUKI
JP·2 granted patents·1 pending application·0 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0146US8253928B2Exposure apparatus and device manufacturing methodUSUI YOSHIYUKI·Filed 2009·Granted Aug 28, 2012·0 cites·7 claims
- 0242US8462316B2Exposure apparatus, method of controlling the same, and device manufacturing methodUSUI YOSHIYUKI·Filed 2009·Granted Jun 11, 2013·0 cites·14 claims
- 0332US2012217675A1Imprint apparatus and article manufacturing methodUSUI YOSHIYUKI·Filed 2012·Application pending·0 cites
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