Assignee
UNAXIS USA INC
US·17 granted patents·1 pending application·302 citations·filing 2000–2005
Top patents by PatentIndex Score
18 records- 0189US6540928B1Magnetic pole fabrication process and deviceUNAXIS USA INC·Filed 2000·Granted Apr 1, 2003·32 cites·16 claims
- 0288US6547975B1Magnetic pole fabrication process and deviceUNAXIS USA INC·Filed 2000·Granted Apr 15, 2003·25 cites·14 claims
- 0388US6495010B2Differentially-pumped material processing systemUNAXIS USA INC·Filed 2001·Granted Dec 17, 2002·34 cites·42 claims
- 0484US6924235B2Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching methodUNAXIS USA INC·Filed 2003·Granted Aug 2, 2005·33 cites·17 claims
- 0583US6982175B2End point detection in time division multiplexed etch processesUNAXIS USA INC·Filed 2004·Granted Jan 3, 2006·18 cites·20 claims
- 0683US6646753B2In-situ thickness and refractive index monitoring and control system for thin film depositionUNAXIS USA INC·Filed 2001·Granted Nov 11, 2003·25 cites·29 claims
- 0782US7101805B2Envelope follower end point detection in time division multiplexed processesUNAXIS USA INC·Filed 2004·Granted Sep 5, 2006·26 cites·47 claims
- 0878US6669824B2Dual-scan thin film processing systemUNAXIS USA INC·Filed 2001·Granted Dec 30, 2003·17 cites·30 claims
- 0977US6544696B2Embedded attenuated phase shift mask and method of making embedded attenuated phase shift maskUNAXIS USA INC·Filed 2001·Granted Apr 8, 2003·15 cites·27 claims
- 1072US7381650B2Method and apparatus for process control in time division multiplexed (TDM) etch processesUNAXIS USA INC·Filed 2005·Granted Jun 3, 2008·5 cites·35 claims
- 1172US6605519B2Method for thin film lift-off processes using lateral extended etching masks and deviceUNAXIS USA INC·Filed 2001·Granted Aug 12, 2003·24 cites·4 claims
- 1268US6718076B2Acousto-optic tunable filter with segmented acousto-optic interaction regionUNAXIS USA INC·Filed 2002·Granted Apr 6, 2004·14 cites·44 claims
- 1367US6905626B2Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasmaUNAXIS USA INC·Filed 2003·Granted Jun 14, 2005·11 cites·16 claims
- 1464US6771482B2Perimeter seal for backside cooling of substratesUNAXIS USA INC·Filed 2002·Granted Aug 3, 2004·12 cites·11 claims
- 1555US7115520B2Method and apparatus for process control in time division multiplexed (TDM) etch processUNAXIS USA INC·Filed 2004·Granted Oct 3, 2006·5 cites·31 claims
- 1655US6846747B2Method for etching viasUNAXIS USA INC·Filed 2003·Granted Jan 25, 2005·4 cites·23 claims
- 1749US7008877B2Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF biasUNAXIS USA INC·Filed 2004·Granted Mar 7, 2006·2 cites·36 claims
- 1833US2004105485A1Temperature compensation for acousto-optc devicesUNAXIS USA INC·Filed 2003·Application pending·0 cites
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