Assignee

UEDA TATSUSHI

JP·2 granted patents·7 citations·filing 2006–2009

Technology mixC23C2 C23F2 H10D2 H10P2

Top patents by PatentIndex Score

2 records

0179US8334215B2Substrate processing method and substrate processing apparatusUEDA TATSUSHI·Filed 2009·Granted Dec 18, 2012·5 cites·15 claims
0268US8066894B2Substrate processing method and substrate processing apparatusUEDA TATSUSHI·Filed 2006·Granted Nov 29, 2011·2 cites·11 claims

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