Assignee
TROOST KARS ZEGER
NL·2 granted patents·8 citations·filing 2006–2006
Top patents by PatentIndex Score
2 records- 0168US8264667B2Lithographic apparatus and device manufacturing method using interferometric and other exposureTROOST KARS ZEGER·Filed 2006·Granted Sep 11, 2012·3 cites·34 claims
- 0266US8259285B2Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint dataTROOST KARS ZEGER·Filed 2006·Granted Sep 4, 2012·5 cites·25 claims
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