Assignee
TRIKON TECHNOLOGIES LTD
GB·15 granted patents·342 citations·filing 1993–2004
Top patents by PatentIndex Score
15 records- 0194US5874367AMethod of treating a semi-conductor waferTRIKON TECHNOLOGIES LTD·Filed 1993·Granted Feb 23, 1999·190 cites·25 claims
- 0273US6287989B1Method of treating a semiconductor wafer in a chamber using hydrogen peroxide and silicon containing gas or vaporTRIKON TECHNOLOGIES LTD·Filed 1998·Granted Sep 11, 2001·35 cites·14 claims
- 0372US6944922B2Method of forming an acoustic resonatorTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Sep 20, 2005·13 cites·17 claims
- 0472US5932289AMethod for filling substrate recesses using pressure and heat treatmentTRIKON TECHNOLOGIES LTD·Filed 1997·Granted Aug 3, 1999·41 cites·26 claims
- 0568US6709556B2Plasma processing apparatusTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Mar 23, 2004·7 cites·13 claims
- 0661US7141913B2Acoustic resonatorsTRIKON TECHNOLOGIES LTD·Filed 2004·Granted Nov 28, 2006·7 cites·10 claims
- 0761US6933246B2Dielectric filmTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Aug 23, 2005·10 cites·19 claims
- 0861US6929724B2ShutterTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Aug 16, 2005·5 cites·9 claims
- 0959US5843535Aforming a layerTRIKON TECHNOLOGIES LTD·Filed 1995·Granted Dec 1, 1998·21 cites·21 claims
- 1050US6860975B2Barrier layer and method of depositing a barrier layerTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Mar 1, 2005·4 cites·12 claims
- 1141US6831010B2Method and depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2000·Granted Dec 14, 2004·2 cites·11 claims
- 1235US6905962B2Method of depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Jun 14, 2005·0 cites·10 claims
- 1334US6514389B1Method of processing a workpieceTRIKON TECHNOLOGIES LTD·Filed 1996·Granted Feb 4, 2003·4 cites·14 claims
- 1432US6019847AApparatus for applying pressure to a coated surface of a workpieceTRIKON TECHNOLOGIES LTD·Filed 1998·Granted Feb 1, 2000·2 cites·15 claims
- 1528US6274245B1Foil for use in filing substrate recessesTRIKON TECHNOLOGIES LTD·Filed 1999·Granted Aug 14, 2001·1 cites·12 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →