Assignee
TRANSFER ENGINEERING AND MFG I
US·2 granted patents·28 citations·filing 2002–2004
Top patents by PatentIndex Score
2 records- 0171US6935828B2Wafer load lock and magnetically coupled linear delivery systemTRANSFER ENGINEERING AND MFG I·Filed 2002·Granted Aug 30, 2005·18 cites·15 claims
- 0261US6971832B2Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactorTRANSFER ENGINEERING AND MFG I·Filed 2004·Granted Dec 6, 2005·10 cites·23 claims
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