Assignee
TORII HIROOMI
JP·2 granted patents·0 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0146US8202139B2Method of operating substrate processing apparatus and substrate processing apparatusTORII HIROOMI·Filed 2009·Granted Jun 19, 2012·0 cites·7 claims
- 0243US8550875B2Method of operating substrate processing apparatus and substrate processing apparatusTORII HIROOMI·Filed 2012·Granted Oct 8, 2013·0 cites·8 claims
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