Assignee
TES CO LTD
KR·19 granted patents·45 pending applications·0 citations·filing 2007–2025
Top patents by PatentIndex Score
64 records- 0169US12233501B2Substrate support deviceTES CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·16 claims
- 0269US2025218733A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 0368US2026075683A1Susceptor assembly and substrate processing apparatusTES CO LTD·Filed 2025·Application pending·0 cites
- 0467US12500102B2Substrate processing apparatus and substrate monitoring methodTES CO LTD·Filed 2023·Granted Dec 16, 2025·0 cites·8 claims
- 0567US12488982B2Method of processing substrateTES CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·7 claims
- 0667US12438020B2Substrate processing apparatusTES CO LTD·Filed 2024·Granted Oct 7, 2025·0 cites·14 claims
- 0767US2024309504A1Substrate processing apparatus and gas supply method thereofTES CO LTD·Filed 2024·Application pending·0 cites
- 0864US2025183075A1Substrate monitoring method and substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 0963US12488993B2Substrate processing methodTES CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·14 claims
- 1063US2025218789A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1163US2025167038A1Substrate processing apparatus and detecting method of tray tiltingTES CO LTD·Filed 2024·Application pending·0 cites
- 1263US2025218785A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1362US2025215556A1Method for forming hydrogen-containing carbon film using pecvdTES CO LTD·Filed 2024·Application pending·0 cites
- 1461US12480211B2Oxygen-doped amorphous carbon film and method for depositing the sameTES CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·9 claims
- 1561US2024410650A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1661US2025198001A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 1761US2025161996A1Substrate processing apparatus and chamber cleaning methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1861US2025391637A1Substrate processing methodTES CO LTD·Filed 2025·Application pending·0 cites
- 1960US2025079193A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 2059US12444578B2Method for protecting apparatus from etching substances and method for forming oxide filmTES CO LTD·Filed 2021·Granted Oct 14, 2025·0 cites·9 claims
- 2159US2025198003A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2259US2023314966A1Mask processing method and apparatusTES CO LTD·Filed 2023·Application pending·0 cites
- 2359US2024167159A1Metal organic chemical vapor deposition deviceTES CO LTD·Filed 2022·Application pending·0 cites
- 2459US2025198000A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 2559US2025051919A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2659US2025001467A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2759US2024175135A1Metal organic chemical vapor deposition apparatusTES CO LTD·Filed 2022·Application pending·0 cites
- 2858US2024370041A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2957US11118266B2Method for depositing protection film of light-emitting elementTES CO LTD·Filed 2018·Granted Sep 14, 2021·0 cites·15 claims
- 3057US2023376055A1Substrate supporting unit and temperature control method thereofTES CO LTD·Filed 2023·Application pending·0 cites
- 3157US2024178023A1Process detecting unit, substrate processing apparatus and substrate process monitoring methodTES CO LTD·Filed 2023·Application pending·0 cites
- 3256US2023204256A1Integrated gas system for substrate processing apparatusTES CO LTD·Filed 2022·Application pending·0 cites
- 3356US2023392262A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2023·Application pending·0 cites
- 3455US10164238B2Method for manufacturing battery protection device and battery protection deviceTES CO LTD·Filed 2014·Granted Dec 25, 2018·0 cites·12 claims
- 3554US2025218773A1Amorphous carbon film and deposition method thereofTES CO LTD·Filed 2024·Application pending·0 cites
- 3653US12512328B2Method of processing substrateTES CO LTD·Filed 2022·Granted Dec 30, 2025·0 cites·20 claims
- 3753US9209064B2Apparatus for transferring substratesTES CO LTD·Filed 2014·Granted Dec 8, 2015·0 cites·12 claims
- 3853US9209063B2Apparatus for transferring substratesTES CO LTD·Filed 2014·Granted Dec 8, 2015·0 cites·4 claims
- 3953US2024347335A1Method for depositing amorphous carbon filmTES CO LTD·Filed 2024·Application pending·0 cites
- 4053US2025293036A1Substrate processing methodTES CO LTD·Filed 2025·Application pending·0 cites
- 4152US12308243B2Method of processing substrate having silicon nitride layerTES CO LTD·Filed 2022·Granted May 20, 2025·0 cites·14 claims
- 4252US2025122611A1Method for processing substrateTES CO LTD·Filed 2024·Application pending·0 cites
- 4352US2008277064A1Plasma processing apparatusTES CO LTD·Filed 2008·Application pending·0 cites
- 4451US12308214B2Method of processing substrateTES CO LTD·Filed 2022·Granted May 20, 2025·0 cites·15 claims
- 4551US9142442B2Apparatus for transferring substratesTES CO LTD·Filed 2013·Granted Sep 22, 2015·0 cites·13 claims
- 4651US2008202689A1Plasma processing apparatusTES CO LTD·Filed 2008·Application pending·0 cites
- 4751US2024213051A1Insulator ring assembly and substrate processing apparatusTES CO LTD·Filed 2023·Application pending·0 cites
- 4850US2019186001A1Thin Film Deposition ApparatusTES CO LTD·Filed 2018·Application pending·0 cites
- 4948US2017342558A1Deposition Method of Metallic Carbon FilmTES CO LTD·Filed 2017·Application pending·0 cites
- 5047US2024042463A1Showerhead assembly and substrate processing apparatusTES CO LTD·Filed 2023·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
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