Assignee
TERA SEMICON CORP
KR·3 granted patents·5 pending applications·24 citations·filing 2002–2015
Top patents by PatentIndex Score
8 records- 0178US7963735B2Holder manufacturing method for loading substrate of semiconductor manufacturing device, batch type boat having holder, loading/unloading method of semiconductor substrate using the same, and semiconductor manufacturing device having the sameTERA SEMICON CORP·Filed 2006·Granted Jun 21, 2011·10 cites·11 claims
- 0264US7077912B2Semiconductor manufacturing systemTERA SEMICON CORP·Filed 2002·Granted Jul 18, 2006·13 cites·22 claims
- 0355US7928008B2Method for fabricating semiconductor deviceTERA SEMICON CORP·Filed 2008·Granted Apr 19, 2011·1 cites·15 claims
- 0443US2011107968A1Semiconductor manufacturing apparatusTERA SEMICON CORP·Filed 2007·Application pending·0 cites
- 0541US2016060757A1Reactor of substrate processing apparatusTERA SEMICON CORP·Filed 2015·Application pending·0 cites
- 0637US2007131990A1System for manufacturing flat panel displayTERA SEMICON CORP·Filed 2006·Application pending·0 cites
- 0732US2015270150A1BoatTERA SEMICON CORP·Filed 2015·Application pending·0 cites
- 0826US2015144060A1Cluster-batch type system for processing substrateTERA SEMICON CORP·Filed 2014·Application pending·0 cites
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