Assignee
TELMEC CO LTD
9 granted patents·437 citations·filing 1980–1983
Top patents by PatentIndex Score
9 records- 0198US4535278ATwo-dimensional precise positioning device for use in a semiconductor manufacturing apparatusTELMEC CO LTD·Filed 1983·Granted Aug 13, 1985·199 cites·18 claims
- 0297US4525659APositioning stage having a vibration suppressorTELMEC CO LTD·Filed 1982·Granted Jun 25, 1985·102 cites·1 claims
- 0386US4555650ATwo dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatusTELMEC CO LTD·Filed 1983·Granted Nov 26, 1985·41 cites·5 claims
- 0486US4377028AMethod for registering a mask pattern in a photo-etching apparatus for semiconductor devicesTELMEC CO LTD·Filed 1980·Granted Mar 22, 1983·40 cites·6 claims
- 0555US4397078AMethod and apparatus for measuring a gap distance between a mask and a wafer to be used in fabrication of semiconductor integrated circuitsTELMEC CO LTD·Filed 1981·Granted Aug 9, 1983·18 cites·6 claims
- 0651US4476420ACircuit arrangement for synthesizing a sinusoidal position signal having a desired phase and high-resolution positioning system making use of the circuit arrangementTELMEC CO LTD·Filed 1982·Granted Oct 9, 1984·11 cites·13 claims
- 0751US4441250AApparatus for registering a mask pattern in a photo-etching apparatus for semiconductor devicesTELMEC CO LTD·Filed 1983·Granted Apr 10, 1984·11 cites·5 claims
- 0842US4347452AMicro-displacement deviceTELMEC CO LTD·Filed 1980·Granted Aug 31, 1982·8 cites·2 claims
- 0939US4390827ALinear motorTELMEC CO LTD·Filed 1981·Granted Jun 28, 1983·7 cites·6 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →