Assignee
TEGAL CORP
95 granted patents·11 pending applications·7,720 citations·filing 1979–2011
Top patents by PatentIndex Score
106 records- 0199US7425224B2High pressure chemical vapor trapping methodTEGAL CORP·Filed 2005·Granted Sep 16, 2008·379 cites·9 claims
- 0299US7163721B2Method to plasma deposit on organic polymer dielectric filmTEGAL CORP·Filed 2003·Granted Jan 16, 2007·531 cites·17 claims
- 0399US7153542B2Assembly line processing methodTEGAL CORP·Filed 2002·Granted Dec 26, 2006·650 cites·27 claims
- 0499US6756318B2Nanolayer thick film processing system and methodTEGAL CORP·Filed 2001·Granted Jun 29, 2004·650 cites·20 claims
- 0598US4464223APlasma reactor apparatus and methodTEGAL CORP·Filed 1983·Granted Aug 7, 1984·275 cites·11 claims
- 0698US4209357APlasma reactor apparatusTEGAL CORP·Filed 1979·Granted Jun 24, 1980·415 cites·25 claims
- 0797US7713592B2Nanolayer deposition processTEGAL CORP·Filed 2003·Granted May 11, 2010·116 cites·13 claims
- 0897US4590042APlasma reactor having slotted manifoldTEGAL CORP·Filed 1984·Granted May 20, 1986·346 cites·13 claims
- 0996US4780169ANon-uniform gas inlet for dry etching apparatusTEGAL CORP·Filed 1987·Granted Oct 25, 1988·625 cites·7 claims
- 1096US4579618APlasma reactor apparatusTEGAL CORP·Filed 1984·Granted Apr 1, 1986·543 cites·3 claims
- 1195US7235484B2Nanolayer thick film processing system and methodTEGAL CORP·Filed 2004·Granted Jun 26, 2007·55 cites·27 claims
- 1295US4790258AMagnetically coupled wafer lift pinsTEGAL CORP·Filed 1987·Granted Dec 13, 1988·420 cites·5 claims
- 1394US4585516AVariable duty cycle, multiple frequency, plasma reactorTEGAL CORP·Filed 1985·Granted Apr 29, 1986·212 cites·7 claims
- 1493US6006694APlasma reactor with a deposition shieldTEGAL CORP·Filed 1998·Granted Dec 28, 1999·60 cites·2 claims
- 1593US4624728APin lift plasma processingTEGAL CORP·Filed 1985·Granted Nov 25, 1986·361 cites·5 claims
- 1693US4585920APlasma reactor removable insertTEGAL CORP·Filed 1984·Granted Apr 29, 1986·289 cites·21 claims
- 1792US7442615B2Semiconductor processing system and methodTEGAL CORP·Filed 2006·Granted Oct 28, 2008·18 cites·20 claims
- 1890US4611919AProcess monitor and method thereofTEGAL CORP·Filed 1984·Granted Sep 16, 1986·83 cites·10 claims
- 1990US4357195AApparatus for controlling a plasma reactionTEGAL CORP·Filed 1980·Granted Nov 2, 1982·36 cites·7 claims
- 2089US7645618B2Dry etch stop process for eliminating electrical shorting in MRAM device structuresTEGAL CORP·Filed 2007·Granted Jan 12, 2010·19 cites·64 claims
- 2189US4793975APlasma Reactor with removable insertTEGAL CORP·Filed 1987·Granted Dec 27, 1988·95 cites·7 claims
- 2289US4724510AElectrostatic wafer clampTEGAL CORP·Filed 1986·Granted Feb 9, 1988·89 cites·5 claims
- 2388US7867905B2System and method for semiconductor processingTEGAL CORP·Filed 2006·Granted Jan 11, 2011·13 cites·20 claims
- 2488US4786359AXenon enhanced plasma etchTEGAL CORP·Filed 1987·Granted Nov 22, 1988·87 cites·5 claims
- 2587US6190496B1Plasma etch reactor and method for emerging filmsTEGAL CORP·Filed 1999·Granted Feb 20, 2001·68 cites·48 claims
- 2687US4632624AVacuum load lock apparatusTEGAL CORP·Filed 1984·Granted Dec 30, 1986·64 cites·9 claims
- 2786US6354240B1Plasma etch reactor having a plurality of magnetsTEGAL CORP·Filed 1998·Granted Mar 12, 2002·57 cites·26 claims
- 2884US4888088AIgnitor for a microwave sustained plasmaTEGAL CORP·Filed 1989·Granted Dec 19, 1989·41 cites·11 claims
- 2984US4614639ACompound flow plasma reactorTEGAL CORP·Filed 1985·Granted Sep 30, 1986·29 cites·9 claims
- 3083US6048435APlasma etch reactor and method for emerging filmsTEGAL CORP·Filed 1996·Granted Apr 11, 2000·58 cites·45 claims
- 3182US4958658AMass flow stabilizedTEGAL CORP·Filed 1987·Granted Sep 25, 1990·47 cites·2 claims
- 3281US4949670AMethod and apparatus for low pressure plasmaTEGAL CORP·Filed 1988·Granted Aug 21, 1990·30 cites·3 claims
- 3380US7361387B2Plasma enhanced pulsed layer depositionTEGAL CORP·Filed 2003·Granted Apr 22, 2008·17 cites·12 claims
- 3479US7439188B2Reactor with heated and textured electrodes and surfacesTEGAL CORP·Filed 2001·Granted Oct 21, 2008·23 cites·12 claims
- 3579US6391148B2Cobalt silicide etch process and apparatusTEGAL CORP·Filed 2001·Granted May 21, 2002·21 cites·17 claims
- 3679US4575714AModule presence sensorTEGAL CORP·Filed 1984·Granted Mar 11, 1986·55 cites·6 claims
- 3778US4861222ACassette elevator for use in a modular article processing machineTEGAL CORP·Filed 1984·Granted Aug 29, 1989·45 cites·7 claims
- 3877US4547247APlasma reactor chuck assemblyTEGAL CORP·Filed 1984·Granted Oct 15, 1985·44 cites·7 claims
- 3976US7223699B2Plasma etch reactor and methodTEGAL CORP·Filed 2005·Granted May 29, 2007·3 cites·20 claims
- 4076US7179350B2Reactive sputtering of silicon nitride films by RF supported DC magnetronTEGAL CORP·Filed 2003·Granted Feb 20, 2007·15 cites·57 claims
- 4176US6858085B1Two-compartment chamber for sequential processingTEGAL CORP·Filed 2002·Granted Feb 22, 2005·18 cites·34 claims
- 4276US4801241AModular article processing machine and method of article handling thereinTEGAL CORP·Filed 1984·Granted Jan 31, 1989·42 cites·2 claims
- 4374US4889588APlasma etch isotropy controlTEGAL CORP·Filed 1989·Granted Dec 26, 1989·67 cites·7 claims
- 4473US5672239AIntegrated semiconductor wafer processing systemTEGAL CORP·Filed 1995·Granted Sep 30, 1997·45 cites·17 claims
- 4572US7169623B2System and method for processing a wafer including stop-on-aluminum processingTEGAL CORP·Filed 2004·Granted Jan 30, 2007·13 cites·85 claims
- 4672US6521081B2Deposition shield for a plasma reactorTEGAL CORP·Filed 2001·Granted Feb 18, 2003·9 cites·6 claims
- 4772US4321232APackage and sterilizing process for sameTEGAL CORP·Filed 1980·Granted Mar 23, 1982·78 cites·4 claims
- 4871US4687543ASelective plasma etching during formation of integrated circuitryTEGAL CORP·Filed 1986·Granted Aug 18, 1987·56 cites·7 claims
- 4970US6998097B1High pressure chemical vapor trapping systemTEGAL CORP·Filed 2000·Granted Feb 14, 2006·13 cites·31 claims
- 5069US4727993AWafer cassette having multi-directional accessTEGAL CORP·Filed 1987·Granted Mar 1, 1988·37 cites·3 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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