Assignee
TECHEST CO LTD
KR·5 granted patents·2 pending applications·6 citations·filing 2013–2019
Top patents by PatentIndex Score
7 records- 0173US9520308B2Temperature control system for semiconductor manufacturing systemTECHEST CO LTD·Filed 2014·Granted Dec 13, 2016·3 cites·4 claims
- 0263US10163665B2Temperature control system for semiconductor manufacturing systemTECHEST CO LTD·Filed 2016·Granted Dec 25, 2018·1 cites·4 claims
- 0353US9395249B2Wide range temperature control system for semiconductor manufacturing equipment using thermoelectric elementTECHEST CO LTD·Filed 2013·Granted Jul 19, 2016·2 cites·19 claims
- 0447US10163666B2Temperature control system for semiconductor manufacturing systemTECHEST CO LTD·Filed 2016·Granted Dec 25, 2018·0 cites·3 claims
- 0543US2014374059A1Temperature control apparatusTECHEST CO LTD·Filed 2014·Application pending·0 cites
- 0634US10910242B2Temperature controller for manufacturing semiconductorTECHEST CO LTD·Filed 2019·Granted Feb 2, 2021·0 cites·9 claims
- 0726US2014262193A1Edge ring cooling module for semi-conductor manufacture chuckTECHEST CO LTD·Filed 2014·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →