Assignee
TECH SEMICONDUCTOR SINGAPORE
SG·12 granted patents·3 pending applications·101 citations·filing 2001–2010
Top patents by PatentIndex Score
15 records- 0184US7163435B2Real time monitoring of CMP pad conditioning processTECH SEMICONDUCTOR SINGAPORE·Filed 2005·Granted Jan 16, 2007·19 cites·22 claims
- 0281US7610111B2Method and system for wafer lot orderTECH SEMICONDUCTOR SINGAPORE·Filed 2007·Granted Oct 27, 2009·21 cites·26 claims
- 0380US7121927B2Retaining ring structure for edge control during chemical-mechanical polishingTECH SEMICONDUCTOR SINGAPORE·Filed 2006·Granted Oct 17, 2006·10 cites·8 claims
- 0475US7407871B2Method for passivation of plasma etch defects in DRAM devicesTECH SEMICONDUCTOR SINGAPORE·Filed 2006·Granted Aug 5, 2008·6 cites·18 claims
- 0573US7029375B2Retaining ring structure for edge control during chemical-mechanical polishingTECH SEMICONDUCTOR SINGAPORE·Filed 2004·Granted Apr 18, 2006·17 cites·8 claims
- 0671US7248975B2Real time monitoring of particulate contamination in a wafer processing chamberTECH SEMICONDUCTOR SINGAPORE·Filed 2005·Granted Jul 24, 2007·7 cites·16 claims
- 0768US7750819B2Real-time detection of wafer shift/slide in a chamberTECH SEMICONDUCTOR SINGAPORE·Filed 2008·Granted Jul 6, 2010·5 cites·40 claims
- 0854US7813893B2Method of process trend matching for identification of process variableTECH SEMICONDUCTOR SINGAPORE·Filed 2007·Granted Oct 12, 2010·2 cites·54 claims
- 0954US7363098B2Method to identify machines causing excursion in semiconductor manufacturingTECH SEMICONDUCTOR SINGAPORE·Filed 2005·Granted Apr 22, 2008·3 cites·29 claims
- 1049US6893983B2Method for depositing a very high phosphorus doped silicon oxide filmTECH SEMICONDUCTOR SINGAPORE·Filed 2001·Granted May 17, 2005·5 cites·9 claims
- 1148US7680556B2Method for data collection during manufacturing processesTECH SEMICONDUCTOR SINGAPORE·Filed 2004·Granted Mar 16, 2010·2 cites·45 claims
- 1245US2010241250A1Feedback and feedforward control of a semiconductor process without output values from upstream processesTECH SEMICONDUCTOR SINGAPORE·Filed 2009·Application pending·0 cites
- 1339US7029933B2Method for monitoring ion implant dosesTECH SEMICONDUCTOR SINGAPORE·Filed 2004·Granted Apr 18, 2006·4 cites·38 claims
- 1431US2008201003A1Method and system for reticle schedulingTECH SEMICONDUCTOR SINGAPORE·Filed 2007·Application pending·0 cites
- 1531US2011201185A1Method to improve transistor performance matching for plasma-assisted source/drain formationTECH SEMICONDUCTOR SINGAPORE·Filed 2010·Application pending·0 cites
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