Assignee
TANABE MASARU
JP·10 granted patents·11 citations·filing 2009–2012
Top patents by PatentIndex Score
10 records- 0188US8142963B2Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor deviceTANABE MASARU·Filed 2010·Granted Mar 27, 2012·5 cites·31 claims
- 0279US8609304B2Method of manufacturing a transfer mask and method of manufacturing a semiconductor deviceTANABE MASARU·Filed 2012·Granted Dec 17, 2013·4 cites·22 claims
- 0374US8455158B2Method of manufacturing a substrate for a mask blank, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor deviceTANABE MASARU·Filed 2011·Granted Jun 4, 2013·2 cites·40 claims
- 0459US8197992B2Photomask blank, photomask blank manufacturing method, and photomask manufacturing methodTANABE MASARU·Filed 2009·Granted Jun 12, 2012·0 cites·10 claims
- 0556US8709683B2Photomask blank, photomask blank manufacturing method, and photomask manufacturing methodTANABE MASARU·Filed 2012·Granted Apr 29, 2014·0 cites·11 claims
- 0656US8107063B2Transparent articleTANABE MASARU·Filed 2010·Granted Jan 31, 2012·0 cites·20 claims
- 0755US8440373B2Mask blank substrate, mask blank, photomask, and methods of manufacturing the sameTANABE MASARU·Filed 2011·Granted May 14, 2013·0 cites·18 claims
- 0854US8592106B2Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor deviceTANABE MASARU·Filed 2012·Granted Nov 26, 2013·0 cites·29 claims
- 0954US8318387B2Mask blank substrate set and mask blank setTANABE MASARU·Filed 2011·Granted Nov 27, 2012·0 cites·24 claims
- 1041US8785085B2Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor deviceTANABE MASARU·Filed 2011·Granted Jul 22, 2014·0 cites·44 claims
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