Assignee

TAMAR TECHNOLOGY INC

US·2 granted patents·86 citations·filing 2005–2007

Technology mixG01B1 G02B1 H10P1

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2 records

0193US7477401B2Trench measurement system employing a chromatic confocal height sensor and a microscopeTAMAR TECHNOLOGY INC·Filed 2005·Granted Jan 13, 2009·57 cites·10 claims
0289US7738113B1Wafer measurement system and apparatusTAMAR TECHNOLOGY INC·Filed 2007·Granted Jun 15, 2010·29 cites·9 claims

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