Assignee
TAKEGUCHI HIROFUMI
JP·4 granted patents·10 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0182US8956694B2Developing apparatus, developing method and storage mediumTAKEGUCHI HIROFUMI·Filed 2010·Granted Feb 17, 2015·4 cites·7 claims
- 0281US8865396B2Developing method and developing apparatusTAKEGUCHI HIROFUMI·Filed 2009·Granted Oct 21, 2014·5 cites·13 claims
- 0365US8147153B2Rinsing method, developing method, developing system and computer-read storage mediumTAKEGUCHI HIROFUMI·Filed 2010·Granted Apr 3, 2012·1 cites·18 claims
- 0443US8469614B2Substrate treatment method, computer storage medium and substrate treatment apparatusTAKEGUCHI HIROFUMI·Filed 2011·Granted Jun 25, 2013·0 cites·13 claims
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