Assignee
TAIWAN SEMICONDUCTOR MFG COMAP
TW·1 granted patent·1 pending application·11 citations·filing 2003–2005
Top patents by PatentIndex Score
2 records- 0161US6875709B2Application of a supercritical CO2 system for curing low k dielectric materialsTAIWAN SEMICONDUCTOR MFG COMAP·Filed 2003·Granted Apr 5, 2005·11 cites·78 claims
- 0236US2007080461A1Ultra low-k dielectric in damascene structuresTAIWAN SEMICONDUCTOR MFG COMAP·Filed 2005·Application pending·0 cites
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