Assignee
SURFACE TECHNOLOGY SYSTEMS LTD
US·4 granted patents·443 citations·filing 1997–1999
Top patents by PatentIndex Score
4 records- 0193US6187685B1Method and apparatus for etching a substrateSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1999·Granted Feb 13, 2001·235 cites·19 claims
- 0285US6261962B1Method of surface treatment of semiconductor substratesSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1997·Granted Jul 17, 2001·108 cites·23 claims
- 0378US6239404B1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1998·Granted May 29, 2001·39 cites·8 claims
- 0473US6259209B1Plasma processing apparatus with coils in dielectric windowsSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1997·Granted Jul 10, 2001·61 cites·14 claims
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