Assignee
SUNDEW TECHNOLOGIES LLC
US·8 granted patents·6 pending applications·1,321 citations·filing 2002–2015
Top patents by PatentIndex Score
14 records- 0199US7682454B2Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systemsSUNDEW TECHNOLOGIES LLC·Filed 2004·Granted Mar 23, 2010·550 cites·50 claims
- 0299US6911092B2ALD apparatus and methodSUNDEW TECHNOLOGIES LLC·Filed 2003·Granted Jun 28, 2005·583 cites·47 claims
- 0396US7250083B2ALD method and apparatusSUNDEW TECHNOLOGIES LLC·Filed 2003·Granted Jul 31, 2007·75 cites·43 claims
- 0493US8012261B2ALD apparatus and methodSUNDEW TECHNOLOGIES LLC·Filed 2009·Granted Sep 6, 2011·16 cites·5 claims
- 0590US7635502B2ALD apparatus and methodSUNDEW TECHNOLOGIES LLC·Filed 2005·Granted Dec 22, 2009·12 cites·28 claims
- 0690US7608539B2ALD method and apparatusSUNDEW TECHNOLOGIES LLC·Filed 2007·Granted Oct 27, 2009·8 cites·3 claims
- 0789US7744060B2Fail-safe pneumatically actuated valve with fast time response and adjustable conductanceSUNDEW TECHNOLOGIES LLC·Filed 2004·Granted Jun 29, 2010·30 cites·10 claims
- 0889US6897508B2Integrated capacitor with enhanced capacitance density and method of fabricating sameSUNDEW TECHNOLOGIES LLC·Filed 2002·Granted May 24, 2005·47 cites·65 claims
- 0969US2010003404A1Ald method and apparatusSUNDEW TECHNOLOGIES LLC·Filed 2009·Application pending·0 cites
- 1059US2016002777A1Apparatus and methods for safely providing hazardous reactantsSUNDEW TECHNOLOGIES LLC·Filed 2015·Application pending·0 cites
- 1158US2010301011A1Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatementSUNDEW TECHNOLOGIES LLC·Filed 2010·Application pending·0 cites
- 1250US2007012402A1Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatementSUNDEW TECHNOLOGIES LLC·Filed 2004·Application pending·0 cites
- 1347US2010129548A1Ald apparatus and methodSUNDEW TECHNOLOGIES LLC·Filed 2010·Application pending·0 cites
- 1446US2011206909A1Coatings for suppressing metallic whiskersSUNDEW TECHNOLOGIES LLC·Filed 2009·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →