Assignee
SUMIYOSHI YUHEI
JP·3 granted patents·3 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0172US8760618B2Projection optical system, exposure apparatus and device manufacturing methodSUMIYOSHI YUHEI·Filed 2010·Granted Jun 24, 2014·3 cites·26 claims
- 0238US8477286B2Projection optical system, exposure apparatus, and device manufacturing methodSUMIYOSHI YUHEI·Filed 2010·Granted Jul 2, 2013·0 cites·12 claims
- 0338US8437004B2Detection apparatusSUMIYOSHI YUHEI·Filed 2010·Granted May 7, 2013·0 cites·13 claims
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