Assignee
SUMCO TECHXIV CORP
JP·45 granted patents·12 pending applications·200 citations·filing 2001–2016
Top patents by PatentIndex Score
57 records- 0192US10227710B2Manufacturing method of silicon monocrystalSUMCO TECHXIV CORP·Filed 2016·Granted Mar 12, 2019·4 cites·2 claims
- 0288US8372196B2Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial waferSUMCO TECHXIV CORP·Filed 2009·Granted Feb 12, 2013·8 cites·13 claims
- 0388US7767969B2Method and apparatus for measuring spectroscopic absorbanceSUMCO TECHXIV CORP·Filed 2009·Granted Aug 3, 2010·30 cites·7 claims
- 0486US8021484B2Method of manufacturing epitaxial silicon wafer and apparatus thereforSUMCO TECHXIV CORP·Filed 2007·Granted Sep 20, 2011·9 cites·15 claims
- 0584US7759227B2Silicon semiconductor substrate heat-treatment method and silicon semiconductor substrate treated by the methodSUMCO TECHXIV CORP·Filed 2005·Granted Jul 20, 2010·13 cites·6 claims
- 0683US7540800B2Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor waferSUMCO TECHXIV CORP·Filed 2007·Granted Jun 2, 2009·10 cites·3 claims
- 0782US7507148B2Polishing apparatus, polishing head and polishing methodSUMCO TECHXIV CORP·Filed 2003·Granted Mar 24, 2009·24 cites·6 claims
- 0882US7390361B2Semiconductor single crystal manufacturing apparatus and graphite crucibleSUMCO TECHXIV CORP·Filed 2005·Granted Jun 24, 2008·5 cites·11 claims
- 0981US8852340B2Method for manufacturing single crystalSUMCO TECHXIV CORP·Filed 2013·Granted Oct 7, 2014·1 cites·5 claims
- 1081US7524371B2Method for manufacturing defect-free silicon single crystalSUMCO TECHXIV CORP·Filed 2007·Granted Apr 28, 2009·6 cites·16 claims
- 1178US10233562B2Method for producing single crystal, and method for producing silicon waferSUMCO TECHXIV CORP·Filed 2014·Granted Mar 19, 2019·1 cites·8 claims
- 1278US9876078B2Method for slicing semiconductor single crystal ingotSUMCO TECHXIV CORP·Filed 2014·Granted Jan 23, 2018·4 cites·5 claims
- 1378US7383156B2Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surfaceSUMCO TECHXIV CORP·Filed 2001·Granted Jun 3, 2008·31 cites·20 claims
- 1476US7537658B2Method for producing epitaxial silicon waferSUMCO TECHXIV CORP·Filed 2005·Granted May 26, 2009·8 cites·4 claims
- 1576US7244309B2Apparatus for pulling single crystal by CZ methodSUMCO TECHXIV CORP·Filed 2005·Granted Jul 17, 2007·5 cites·9 claims
- 1673US7303691B2Polishing method for semiconductor waferSUMCO TECHXIV CORP·Filed 2006·Granted Dec 4, 2007·6 cites·12 claims
- 1772US9758899B2Manufacturing method of silicon single crystal having low-resistivity electrical characteristicsSUMCO TECHXIV CORP·Filed 2014·Granted Sep 12, 2017·0 cites·9 claims
- 1871US9293318B2Semiconductor wafer manufacturing methodSUMCO TECHXIV CORP·Filed 2013·Granted Mar 22, 2016·2 cites·5 claims
- 1971US7654883B2Polishing apparatus, polishing head and polishing methodSUMCO TECHXIV CORP·Filed 2009·Granted Feb 2, 2010·4 cites·3 claims
- 2070US8043428B2Process for production of silicon single crystalSUMCO TECHXIV CORP·Filed 2008·Granted Oct 25, 2011·1 cites·3 claims
- 2168US8747551B2Process for production of silicon single crystal, and highly doped N-type semiconductor substrateSUMCO TECHXIV CORP·Filed 2013·Granted Jun 10, 2014·0 cites·2 claims
- 2266US7993452B2Method of manufacturing epitaxial silicon waferSUMCO TECHXIV CORP·Filed 2007·Granted Aug 9, 2011·3 cites·6 claims
- 2366US7875117B2Nitrogen doped silicon wafer and manufacturing method thereofSUMCO TECHXIV CORP·Filed 2005·Granted Jan 25, 2011·4 cites·9 claims
- 2466US7727334B2Apparatus for pulling single crystal by CZ methodSUMCO TECHXIV CORP·Filed 2007·Granted Jun 1, 2010·2 cites·12 claims
- 2562US7875116B2Silicon single crystal producing method, annealed wafer, and method of producing annealed waferSUMCO TECHXIV CORP·Filed 2006·Granted Jan 25, 2011·2 cites·8 claims
- 2660US8956927B2Method of manufacturing epitaxial silicon wafer and epitaxial silicon wafer manufactured by the methodSUMCO TECHXIV CORP·Filed 2013·Granted Feb 17, 2015·1 cites·8 claims
- 2756US8382895B2Silicon single crystal manufacturing method, silicon single crystal, silicon wafer, apparatus for controlling manufacture of silicon single crystal, and programSUMCO TECHXIV CORP·Filed 2007·Granted Feb 26, 2013·0 cites·5 claims
- 2856US7686891B2Method and apparatus for collecting chemicals from semiconductor waferSUMCO TECHXIV CORP·Filed 2005·Granted Mar 30, 2010·1 cites·1 claims
- 2954US7918934B2Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingotSUMCO TECHXIV CORP·Filed 2006·Granted Apr 5, 2011·0 cites·2 claims
- 3053US7767020B2Method for manufacturing single crystal semiconductorSUMCO TECHXIV CORP·Filed 2005·Granted Aug 3, 2010·1 cites·6 claims
- 3152US2007113778A1Epitaxial silicon waferSUMCO TECHXIV CORP·Filed 2007·Application pending·0 cites
- 3252US2007281084A1Apparatus and method for depositing layer on substrateSUMCO TECHXIV CORP·Filed 2007·Application pending·0 cites
- 3351US8853103B2Method for manufacturing semiconductor waferSUMCO TECHXIV CORP·Filed 2013·Granted Oct 7, 2014·0 cites·8 claims
- 3451US7666063B2Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor waferSUMCO TECHXIV CORP·Filed 2008·Granted Feb 23, 2010·0 cites·3 claims
- 3550US2011017948A1Silicon single crystal pulling apparatus and manufacturing method of silicon single crystalSUMCO TECHXIV CORP·Filed 2009·Application pending·0 cites
- 3648US10553420B2Method and device for polishing semiconductor waferSUMCO TECHXIV CORP·Filed 2014·Granted Feb 4, 2020·0 cites·4 claims
- 3748US2009145350A1Method of injecting dopant gasSUMCO TECHXIV CORP·Filed 2007·Application pending·0 cites
- 3848US2009297302A1Wafer conveyance method and wafer conveyance deviceSUMCO TECHXIV CORP·Filed 2009·Application pending·0 cites
- 3947US2010272892A1Film formation reactive apparatus and method for producing film-formed substrateSUMCO TECHXIV CORP·Filed 2010·Application pending·0 cites
- 4046US9975217B2Scattering plate, grinding wheel, and grinding deviceSUMCO TECHXIV CORP·Filed 2014·Granted May 22, 2018·0 cites·5 claims
- 4145US8045150B2Semiconductor wafer inspection methodSUMCO TECHXIV CORP·Filed 2009·Granted Oct 25, 2011·0 cites·4 claims
- 4245US7396406B2Single crystal semiconductor manufacturing apparatus and methodSUMCO TECHXIV CORP·Filed 2004·Granted Jul 8, 2008·1 cites·7 claims
- 4344US2007240629A1Method for manufacturing a silicon single crystalSUMCO TECHXIV CORP·Filed 2007·Application pending·0 cites
- 4443US7920999B2Method of predicting internal gettering behavior in silicon substrates and storage medium storing program for predicting internal gettering behaviorSUMCO TECHXIV CORP·Filed 2006·Granted Apr 5, 2011·0 cites·8 claims
- 4543US7226505B2Method for vanishing defects in single crystal silicon and single crystal siliconSUMCO TECHXIV CORP·Filed 2002·Granted Jun 5, 2007·2 cites·11 claims
- 4643US2009053981A1Method of recycling abrasive slurrySUMCO TECHXIV CORP·Filed 2008·Application pending·0 cites
- 4743US2010212588A1Semiconductor single crystal production apparatusSUMCO TECHXIV CORP·Filed 2008·Application pending·0 cites
- 4841US7494597B2Method and apparatus for etching disk-like memberSUMCO TECHXIV CORP·Filed 2004·Granted Feb 24, 2009·3 cites·11 claims
- 4940US8361223B2Method for measuring liquid level in single crystal pulling apparatus employing CZ methodSUMCO TECHXIV CORP·Filed 2008·Granted Jan 29, 2013·0 cites·4 claims
- 5040US7699934B2Epitaxial wafer production apparatus and susceptor structureSUMCO TECHXIV CORP·Filed 2003·Granted Apr 20, 2010·5 cites·4 claims
Showing the top 50 of 57 patent records by PatentIndex Score.
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