Assignee
SUBMICRON SYSTEMS INC
US·10 granted patents·474 citations·filing 1989–1997
Top patents by PatentIndex Score
10 records- 0197US5228206ACluster tool dry cleaning systemSUBMICRON SYSTEMS INC·Filed 1992·Granted Jul 20, 1993·112 cites·4 claims
- 0287US5234540AProcess for etching oxide films in a sealed photochemical reactorSUBMICRON SYSTEMS INC·Filed 1992·Granted Aug 10, 1993·105 cites·1 claims
- 0385US5247954AMegasonic cleaning systemSUBMICRON SYSTEMS INC·Filed 1991·Granted Sep 28, 1993·95 cites·2 claims
- 0480US5082518ASparger plate for ozone gas diffusionSUBMICRON SYSTEMS INC·Filed 1990·Granted Jan 21, 1992·82 cites·7 claims
- 0569US5625249AMegasonic cleaning systemSUBMICRON SYSTEMS INC·Filed 1994·Granted Apr 29, 1997·46 cites·10 claims
- 0652US5437710AChemical processing system for maintaining concentration of semiconductor processing solutionSUBMICRON SYSTEMS INC·Filed 1994·Granted Aug 1, 1995·9 cites·3 claims
- 0735US5454677AHigh temperature ceramic nutSUBMICRON SYSTEMS INC·Filed 1994·Granted Oct 3, 1995·6 cites·1 claims
- 0830US5149158AWafer carrier holder for wafer carriersSUBMICRON SYSTEMS INC·Filed 1990·Granted Sep 22, 1992·10 cites·9 claims
- 0928US5807408AIndustrial robot safety device that shuts down operation in reponse to variation in tension of a ropeSUBMICRON SYSTEMS INC·Filed 1997·Granted Sep 15, 1998·7 cites·12 claims
- 1028US5100190AWafer carrier holder for wafer carriersSUBMICRON SYSTEMS INC·Filed 1989·Granted Mar 31, 1992·2 cites·1 claims
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