Assignee
STRASBAUGH INC
US·5 granted patents·1 pending application·240 citations·filing 1999–2015
Top patents by PatentIndex Score
6 records- 0194US6146242AOptical view port for chemical mechanical planarization endpoint detectionSTRASBAUGH INC·Filed 1999·Granted Nov 14, 2000·118 cites·2 claims
- 0284US7083497B2Polishing pad with built-in optical sensorSTRASBAUGH INC·Filed 2006·Granted Aug 1, 2006·9 cites·17 claims
- 0382US6183341B1Slurry pump control systemSTRASBAUGH INC·Filed 1999·Granted Feb 6, 2001·38 cites·4 claims
- 0478US6131589AAccurate positioning of a waferSTRASBAUGH INC·Filed 1999·Granted Oct 17, 2000·36 cites·10 claims
- 0570US6254155B1Apparatus and method for reliably releasing wet, thin wafersSTRASBAUGH INC·Filed 1999·Granted Jul 3, 2001·39 cites·11 claims
- 0633US2016288291A1Method for grinding wafers by shaping resilient chuck coveringSTRASBAUGH INC·Filed 2015·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →