Assignee
STRANG ERIC J
US·4 granted patents·37 citations·filing 2002–2011
Top patents by PatentIndex Score
4 records- 0178US8562743B2Method and apparatus for atomic layer depositionSTRANG ERIC J·Filed 2011·Granted Oct 22, 2013·1 cites·20 claims
- 0275US8877000B2Shower head gas injection apparatus with secondary high pressure pulsed gas injectionSTRANG ERIC J·Filed 2002·Granted Nov 4, 2014·14 cites·22 claims
- 0365US8073667B2System and method for using first-principles simulation to control a semiconductor manufacturing processSTRANG ERIC J·Filed 2003·Granted Dec 6, 2011·12 cites·67 claims
- 0464US8296687B2System and method for using first-principles simulation to analyze a process performed by a semiconductor processing toolSTRANG ERIC J·Filed 2003·Granted Oct 23, 2012·10 cites·59 claims
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