Assignee
STEAG MICRO TECH GMBH
US·33 granted patents·626 citations·filing 1994–2001
Top patents by PatentIndex Score
33 records- 0187US6108932AMethod and apparatus for thermocapillary dryingSTEAG MICRO TECH GMBH·Filed 1999·Granted Aug 29, 2000·100 cites·16 claims
- 0279US5569330AMethod and device for chemically treating substratesSTEAG MICRO TECH GMBH·Filed 1994·Granted Oct 29, 1996·96 cites·27 claims
- 0374US5992431ADevice for treating substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1998·Granted Nov 30, 1999·39 cites·13 claims
- 0473US5921257ADevice for treating substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1996·Granted Jul 13, 1999·38 cites·31 claims
- 0568US6539956B1Method and device for drying substratesSTEAG MICRO TECH GMBH·Filed 1998·Granted Apr 1, 2003·30 cites·4 claims
- 0667US6205292B1Fluid heaterSTEAG MICRO TECH GMBH·Filed 1997·Granted Mar 20, 2001·34 cites·14 claims
- 0766US6817369B1Device and method for cleaning substratesSTEAG MICRO TECH GMBH·Filed 2000·Granted Nov 16, 2004·12 cites·19 claims
- 0865US6128829AMethod for drying substratesSTEAG MICRO TECH GMBH·Filed 1999·Granted Oct 10, 2000·26 cites·31 claims
- 0963US6799588B1Apparatus for treating substratesSTEAG MICRO TECH GMBH·Filed 2000·Granted Oct 5, 2004·11 cites·13 claims
- 1063US6488779B1Method and apparatus for cleaning substratesSTEAG MICRO TECH GMBH·Filed 2000·Granted Dec 3, 2002·19 cites·10 claims
- 1163US5902402ADevice for chemical wet treatmentSTEAG MICRO TECH GMBH·Filed 1995·Granted May 11, 1999·36 cites·19 claims
- 1260US6240938B1Device for treating substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1996·Granted Jun 5, 2001·26 cites·24 claims
- 1357US6569302B1Substrate carrierSTEAG MICRO TECH GMBH·Filed 1999·Granted May 27, 2003·26 cites·41 claims
- 1455US5654041AMethod and device for lacquering or coating of a substrate by a capillary slotSTEAG MICRO TECH GMBH·Filed 1995·Granted Aug 5, 1997·25 cites·20 claims
- 1552US6352084B1Substrate treatment deviceSTEAG MICRO TECH GMBH·Filed 1997·Granted Mar 5, 2002·19 cites·21 claims
- 1649US6799885B2Method of improving the function of an hour-glassSTEAG MICRO TECH GMBH·Filed 2001·Granted Oct 5, 2004·2 cites·4 claims
- 1746US5650196ADevice for coating substrates in semiconductor productionSTEAG MICRO TECH GMBH·Filed 1994·Granted Jul 22, 1997·12 cites·25 claims
- 1845US6189552B1Substrate processing deviceSTEAG MICRO TECH GMBH·Filed 1997·Granted Feb 20, 2001·13 cites·19 claims
- 1937US6523552B2Facility for treating objects in a process tankSTEAG MICRO TECH GMBH·Filed 1996·Granted Feb 25, 2003·9 cites·10 claims
- 2037US6244282B1Substrate treatment deviceSTEAG MICRO TECH GMBH·Filed 1997·Granted Jun 12, 2001·6 cites·5 claims
- 2135US6805754B1Device and method for processing substratesSTEAG MICRO TECH GMBH·Filed 1999·Granted Oct 19, 2004·8 cites·28 claims
- 2233US6257255B1Substrate treatment deviceSTEAG MICRO TECH GMBH·Filed 1997·Granted Jul 10, 2001·4 cites·11 claims
- 2331US6647641B1Device and method for the treatment of substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1998·Granted Nov 18, 2003·1 cites·18 claims
- 2431US6607604B1Method and apparatus for treating substratesSTEAG MICRO TECH GMBH·Filed 1998·Granted Aug 19, 2003·3 cites·14 claims
- 2531US5954068ADevice and method for treating substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1997·Granted Sep 21, 1999·5 cites·31 claims
- 2630US6145520AApparatus for processing substrates in a fluid tankSTEAG MICRO TECH GMBH·Filed 1997·Granted Nov 14, 2000·6 cites·7 claims
- 2726US6269822B1Installation for wet-treating substratesSTEAG MICRO TECH GMBH·Filed 1997·Granted Aug 7, 2001·5 cites·48 claims
- 2826US5879464AMethod and device for wet-processing substrates in a vesselSTEAG MICRO TECH GMBH·Filed 1996·Granted Mar 9, 1999·7 cites·18 claims
- 2925US6488987B1Apparatus and method for processing substratesSTEAG MICRO TECH GMBH·Filed 1999·Granted Dec 3, 2002·0 cites·20 claims
- 3025US6360921B1Bellows-type dispensing pumpSTEAG MICRO TECH GMBH·Filed 1998·Granted Mar 26, 2002·2 cites·13 claims
- 3125US6270585B1Device and process for treating substrates in a fluid containerSTEAG MICRO TECH GMBH·Filed 1997·Granted Aug 7, 2001·4 cites·7 claims
- 3221US6379470B2Method and device for treating substratesSTEAG MICRO TECH GMBH·Filed 1997·Granted Apr 30, 2002·0 cites·9 claims
- 3318US6164300ASubstate-treating deviceSTEAG MICRO TECH GMBH·Filed 1997·Granted Dec 26, 2000·2 cites·13 claims
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