Assignee
SPUTTERED FILMS INC
US·18 granted patents·787 citations·filing 1983–2001
Top patents by PatentIndex Score
18 records- 0197US5310410AMethod for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatusSPUTTERED FILMS INC·Filed 1991·Granted May 10, 1994·500 cites·11 claims
- 0287US4523985AWafer processing machineSPUTTERED FILMS INC·Filed 1983·Granted Jun 18, 1985·83 cites·12 claims
- 0382US5759268ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Jun 2, 1998·42 cites·19 claims
- 0478US5135634AApparatus for depositing a thin layer of sputtered atoms on a memberSPUTTERED FILMS INC·Filed 1991·Granted Aug 4, 1992·32 cites·20 claims
- 0572US4522697AWafer processing machineSPUTTERED FILMS INC·Filed 1983·Granted Jun 11, 1985·37 cites·12 claims
- 0670US5830272ASystem for and method of providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1995·Granted Nov 3, 1998·17 cites·33 claims
- 0769US6783638B2Flat magnetronSPUTTERED FILMS INC·Filed 2001·Granted Aug 31, 2004·9 cites·72 claims
- 0855US5858101ASystem providing a controlled deposition of wafersSPUTTERED FILMS INC·Filed 1997·Granted Jan 12, 1999·8 cites·14 claims
- 0954US5865969AApparatus for, and method of, providing a deposition on a substrateSPUTTERED FILMS INC·Filed 1996·Granted Feb 2, 1999·8 cites·10 claims
- 1052US5766426AApparatus for, and method of, depositing a film on a substrateSPUTTERED FILMS INC·Filed 1995·Granted Jun 16, 1998·10 cites·35 claims
- 1151US5881668ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 16, 1999·7 cites·12 claims
- 1249US6086947AMethod of depositing materials on a wafer to eliminate the effect of cracks in the depositionSPUTTERED FILMS INC·Filed 1996·Granted Jul 11, 2000·11 cites·26 claims
- 1343US5879460ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 9, 1999·4 cites·13 claims
- 1440US6605198B1Apparatus for, and method of, depositing a film on a substrateSPUTTERED FILMS INC·Filed 1995·Granted Aug 12, 2003·8 cites·63 claims
- 1539US6051066AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferSPUTTERED FILMS INC·Filed 1998·Granted Apr 18, 2000·3 cites·5 claims
- 1639US5061360AApparatus for depositing a thin film of a sputtered material on a memberSPUTTERED FILMS INC·Filed 1990·Granted Oct 29, 1991·5 cites·15 claims
- 1732US5882403ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 16, 1999·1 cites·12 claims
- 1831US5914017AApparatus for, and method of, removing hydrocarbons from the surface of a substrateSPUTTERED FILMS INC·Filed 1996·Granted Jun 22, 1999·2 cites·30 claims
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