Assignee
SPTS TECHNOLOGIES LTD
GB·75 granted patents·35 pending applications·36 citations·filing 2012–2025
Top patents by PatentIndex Score
110 records- 0190US11802341B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2021·Granted Oct 31, 2023·2 cites·11 claims
- 0284US10079150B2Method and apparatus for dry gas phase chemically etching a structureSPTS TECHNOLOGIES LTD·Filed 2015·Granted Sep 18, 2018·4 cites·17 claims
- 0383US10283381B2Apparatus for plasma dicingSPTS TECHNOLOGIES LTD·Filed 2016·Granted May 7, 2019·5 cites·15 claims
- 0481US11913109B2Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour depositionSPTS TECHNOLOGIES LTD·Filed 2019·Granted Feb 27, 2024·1 cites·6 claims
- 0579US12077863B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2023·Granted Sep 3, 2024·0 cites·13 claims
- 0678US10900114B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2016·Granted Jan 26, 2021·3 cites·18 claims
- 0777US2024014018A1Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour DepositionSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 0874US10601388B2Method of depositionSPTS TECHNOLOGIES LTD·Filed 2016·Granted Mar 24, 2020·1 cites·17 claims
- 0973US11545394B2Semiconductor wafer dicing processSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jan 3, 2023·2 cites·12 claims
- 1072US11710670B2Apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jul 25, 2023·1 cites·20 claims
- 1172US11189463B2Plasma generating arrangementSPTS TECHNOLOGIES LTD·Filed 2019·Granted Nov 30, 2021·1 cites·20 claims
- 1272US11127568B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2019·Granted Sep 21, 2021·1 cites·16 claims
- 1371US12492465B2PVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2024·Granted Dec 9, 2025·0 cites·22 claims
- 1469US11718908B2DC magnetron sputteringSPTS TECHNOLOGIES LTD·Filed 2021·Granted Aug 8, 2023·0 cites·14 claims
- 1569US10153135B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2016·Granted Dec 11, 2018·2 cites·22 claims
- 1668US9472610B2SubstrateSPTS TECHNOLOGIES LTD·Filed 2015·Granted Oct 18, 2016·2 cites·26 claims
- 1767US10309014B2Method of cleaning a plasma processing deviceSPTS TECHNOLOGIES LTD·Filed 2017·Granted Jun 4, 2019·1 cites·21 claims
- 1867US2024186171A1SupportSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 1967US2026086275A1Method of etching a substrateSPTS TECHNOLOGIES LTD·Filed 2025·Application pending·0 cites
- 2066US11961722B2Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor depositionSPTS TECHNOLOGIES LTD·Filed 2022·Granted Apr 16, 2024·0 cites·17 claims
- 2165US10622193B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2015·Granted Apr 14, 2020·1 cites·25 claims
- 2265US2026002249A1Method of treating a shutter of a pvd apparatusSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 2364US9601341B2Method of etchingSPTS TECHNOLOGIES LTD·Filed 2014·Granted Mar 21, 2017·1 cites·19 claims
- 2463US9842772B2Method of etchingSPTS TECHNOLOGIES LTD·Filed 2015·Granted Dec 12, 2017·1 cites·21 claims
- 2562US9728432B2Method of degassingSPTS TECHNOLOGIES LTD·Filed 2015·Granted Aug 8, 2017·1 cites·13 claims
- 2662US9640370B2Etching apparatus and methodsSPTS TECHNOLOGIES LTD·Filed 2014·Granted May 2, 2017·1 cites·12 claims
- 2762US8709268B2Etching apparatus and methodsSPTS TECHNOLOGIES LTD·Filed 2012·Granted Apr 29, 2014·1 cites·15 claims
- 2862US2025308913A1Method of etchingSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 2962US2025191940A1Apparatus and method for processing a semiconductor substrateSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 3062US2025229437A1End effector for carrying a wafer or a wafer assemblySPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 3162US2025210362A1Methods of treating a semiconductor substrate and apparatusSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 3262US2025308912A1Method and apparatus for plasma etching a substrateSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 3360US11056379B2Clamp assemblySPTS TECHNOLOGIES LTD·Filed 2015·Granted Jul 6, 2021·1 cites·20 claims
- 3460US9165762B2Method of depositing silicone dioxide filmsSPTS TECHNOLOGIES LTD·Filed 2013·Granted Oct 20, 2015·1 cites·7 claims
- 3560US2024213030A1Method of Plasma EtchingSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 3660US2025022728A1Substrate Processing SystemSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 3759US2026033259A1Method of plasma dicing a semiconductor waferSPTS TECHNOLOGIES LTD·Filed 2025·Application pending·0 cites
- 3858US12534799B2Multilayer hydrophobic filmSPTS TECHNOLOGIES LTD·Filed 2023·Granted Jan 27, 2026·0 cites·15 claims
- 3958US11643744B2Apparatus for electrochemically processing semiconductor substratesSPTS TECHNOLOGIES LTD·Filed 2021·Granted May 9, 2023·0 cites·19 claims
- 4057US11875980B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jan 16, 2024·0 cites·9 claims
- 4157US10900123B2Apparatus and method for controlled application of reactive vapors to produce thin films and coatingsSPTS TECHNOLOGIES LTD·Filed 2017·Granted Jan 26, 2021·0 cites·16 claims
- 4257US9048066B2Method of etchingSPTS TECHNOLOGIES LTD·Filed 2013·Granted Jun 2, 2015·1 cites·12 claims
- 4356US10062576B2Method for plasma etching a workpieceSPTS TECHNOLOGIES LTD·Filed 2017·Granted Aug 28, 2018·1 cites·19 claims
- 4456US2025046604A1PECVD Method and ApparatusSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 4555US2025122615A1Method of cleaning a plasma processing deviceSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 4654US9803272B2Deposition of silicon dioxideSPTS TECHNOLOGIES LTD·Filed 2014·Granted Oct 31, 2017·0 cites·12 claims
- 4753US12590760B2Spin rinse dryer with improved drying characteristicsSPTS TECHNOLOGIES LTD·Filed 2021·Granted Mar 31, 2026·0 cites·20 claims
- 4853US12565698B2Method of operating a PVD apparatusSPTS TECHNOLOGIES LTD·Filed 2022·Granted Mar 3, 2026·0 cites·21 claims
- 4953US2024177997A1Method of Operating a PVD ApparatusSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 5053US2026068527A1Method of plasma etchingSPTS TECHNOLOGIES LTD·Filed 2025·Application pending·0 cites
Showing the top 50 of 110 patent records by PatentIndex Score.
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