Assignee
SPEEDFAM IPEC
US·3 granted patents·117 citations·filing 1998–2001
Top patents by PatentIndex Score
3 records- 0183US6572445B2Multizone slurry delivery for chemical mechanical polishing toolSPEEDFAM IPEC·Filed 2001·Granted Jun 3, 2003·25 cites·16 claims
- 0274US6261158B1Multi-step chemical mechanical polishingSPEEDFAM IPEC·Filed 1998·Granted Jul 17, 2001·57 cites·42 claims
- 0370US6095900AMethod for manufacturing a workpiece carrier backing pad and pressure plate for polishing semiconductor wafersSPEEDFAM IPEC·Filed 1999·Granted Aug 1, 2000·35 cites·6 claims
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