Assignee
SPEEDFAM CORP
US·50 granted patents·2,689 citations·filing 1974–1999
Top patents by PatentIndex Score
50 records- 0198US4519168ALiquid waxless fixturing of microsize wafersSPEEDFAM CORP·Filed 1983·Granted May 28, 1985·80 cites·5 claims
- 0297US5486131ADevice for conditioning polishing padsSPEEDFAM CORP·Filed 1994·Granted Jan 23, 1996·212 cites·10 claims
- 0396US5872633AMethods and apparatus for detecting removal of thin film layers during planarizationSPEEDFAM CORP·Filed 1997·Granted Feb 16, 1999·390 cites·17 claims
- 0495US5569062APolishing pad conditioningSPEEDFAM CORP·Filed 1995·Granted Oct 29, 1996·156 cites·10 claims
- 0595US5329732AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1992·Granted Jul 19, 1994·262 cites·14 claims
- 0695US4270314ABearing mount for lapping machine pressure plateSPEEDFAM CORP·Filed 1979·Granted Jun 2, 1981·43 cites·6 claims
- 0794US5695392APolishing device with improved handling of fluid polishing mediaSPEEDFAM CORP·Filed 1996·Granted Dec 9, 1997·160 cites·45 claims
- 0892US5498199AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·198 cites·5 claims
- 0991US5916015AWafer carrier for semiconductor wafer polishing machineSPEEDFAM CORP·Filed 1997·Granted Jun 29, 1999·107 cites·23 claims
- 1088US5733171AApparatus for the in-process detection of workpieces in a CMP environmentSPEEDFAM CORP·Filed 1996·Granted Mar 31, 1998·71 cites·16 claims
- 1187US5857893AMethods and apparatus for measuring and dispensing processing solutions to a CMP machineSPEEDFAM CORP·Filed 1996·Granted Jan 12, 1999·78 cites·11 claims
- 1283US5498196AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·72 cites·3 claims
- 1382US5595529ADual column abrading machineSPEEDFAM CORP·Filed 1994·Granted Jan 21, 1997·36 cites·15 claims
- 1481US5868605AIn-situ polishing pad flatness controlSPEEDFAM CORP·Filed 1995·Granted Feb 9, 1999·53 cites·6 claims
- 1579US5791975ABacking padSPEEDFAM CORP·Filed 1995·Granted Aug 11, 1998·46 cites·2 claims
- 1678US4593716AControl valve assembly for abrasive slurrySPEEDFAM CORP·Filed 1980·Granted Jun 10, 1986·18 cites·3 claims
- 1777US5972162AWafer polishing with improved end point detectionSPEEDFAM CORP·Filed 1998·Granted Oct 26, 1999·41 cites·18 claims
- 1875US5685766APolishing control methodSPEEDFAM CORP·Filed 1995·Granted Nov 11, 1997·55 cites·14 claims
- 1975US5274960AUniform velocity double sided finishing machineSPEEDFAM CORP·Filed 1990·Granted Jan 4, 1994·30 cites·13 claims
- 2073US5224304AAutomated free abrasive machine for one side piece part machiningSPEEDFAM CORP·Filed 1991·Granted Jul 6, 1993·27 cites·16 claims
- 2172US6030280AApparatus for holding workpieces during lapping, honing, and polishingSPEEDFAM CORP·Filed 1997·Granted Feb 29, 2000·33 cites·6 claims
- 2272US5975094AMethod and apparatus for enhanced cleaning of a workpiece with mechanical energySPEEDFAM CORP·Filed 1997·Granted Nov 2, 1999·45 cites·28 claims
- 2369US5842912AApparatus for conditioning polishing pads utilizing brazed diamond technologySPEEDFAM CORP·Filed 1996·Granted Dec 1, 1998·38 cites·7 claims
- 2469US5823853AApparatus for the in-process detection of workpieces with a monochromatic light sourceSPEEDFAM CORP·Filed 1997·Granted Oct 20, 1998·36 cites·9 claims
- 2569US5769691AMethods and apparatus for the chemical mechanical planarization of electronic devicesSPEEDFAM CORP·Filed 1996·Granted Jun 23, 1998·31 cites·19 claims
- 2667US5954888APost-CMP wet-HF cleaning stationSPEEDFAM CORP·Filed 1998·Granted Sep 21, 1999·28 cites·15 claims
- 2765US5782678ADual column abrading machineSPEEDFAM CORP·Filed 1996·Granted Jul 21, 1998·23 cites·9 claims
- 2865US5134807AMultilevel grinding apparatusSPEEDFAM CORP·Filed 1986·Granted Aug 4, 1992·22 cites·3 claims
- 2965US4693012AMeasuring bar for free abrasive machinesSPEEDFAM CORP·Filed 1985·Granted Sep 15, 1987·21 cites·11 claims
- 3063US5993293AMethod and apparatus for improved semiconductor wafer polishingSPEEDFAM CORP·Filed 1998·Granted Nov 30, 1999·24 cites·14 claims
- 3163US5899216AApparatus for rinsing wafers in the context of a combined cleaning rinsing and drying systemSPEEDFAM CORP·Filed 1997·Granted May 4, 1999·31 cites·19 claims
- 3263US5123218ACircumferential pattern finishing methodSPEEDFAM CORP·Filed 1991·Granted Jun 23, 1992·19 cites·18 claims
- 3359US5957763APolishing apparatus with support columns supporting multiple platform membersSPEEDFAM CORP·Filed 1997·Granted Sep 28, 1999·20 cites·20 claims
- 3459US5803798ADual column abrading machineSPEEDFAM CORP·Filed 1997·Granted Sep 8, 1998·17 cites·8 claims
- 3556US6001005APolishing apparatusSPEEDFAM CORP·Filed 1998·Granted Dec 14, 1999·18 cites·19 claims
- 3654US5997390APolishing apparatus with improved alignment of polishing platesSPEEDFAM CORP·Filed 1998·Granted Dec 7, 1999·17 cites·13 claims
- 3754US5762543APolishing apparatus with improved product unloadingSPEEDFAM CORP·Filed 1995·Granted Jun 9, 1998·19 cites·34 claims
- 3852US5870792AApparatus for cleaning wafers and discsSPEEDFAM CORP·Filed 1997·Granted Feb 16, 1999·19 cites·12 claims
- 3950US6555466B1Two-step chemical-mechanical planarization for damascene structures on semiconductor wafersSPEEDFAM CORP·Filed 1999·Granted Apr 29, 2003·17 cites·3 claims
- 4048US5791978ABearing assembly for wafer planarization carrierSPEEDFAM CORP·Filed 1996·Granted Aug 11, 1998·12 cites·15 claims
- 4143US5921849AMethod and apparatus for distributing a polishing agent onto a polishing elementSPEEDFAM CORP·Filed 1997·Granted Jul 13, 1999·14 cites·15 claims
- 4243US5187901ACircumferential pattern finishing machineSPEEDFAM CORP·Filed 1990·Granted Feb 23, 1993·8 cites·12 claims
- 4342US5834645AMethods and apparatus for the in-process detection of workpieces with a physical contact probeSPEEDFAM CORP·Filed 1997·Granted Nov 10, 1998·12 cites·23 claims
- 4442US5436045ALow abraision material comprising a fibrous matrix impregnated with a polyurethane resin wherein fiber ends are exposed on at least one surface of the materialSPEEDFAM CORP·Filed 1993·Granted Jul 25, 1995·8 cites·9 claims
- 4540US5885312AGrinding composition using abrasive particles on bubblesSPEEDFAM CORP·Filed 1997·Granted Mar 23, 1999·10 cites·27 claims
- 4634US4047639AAbrasive slurry regulator assemblySPEEDFAM CORP·Filed 1976·Granted Sep 13, 1977·3 cites·5 claims
- 4731US5713968AAbrasive foam grinding compositionSPEEDFAM CORP·Filed 1996·Granted Feb 3, 1998·6 cites·36 claims
- 4828US3991918AAbrasive slurry regulator assemblySPEEDFAM CORP·Filed 1974·Granted Nov 16, 1976·2 cites·1 claims
- 4927US4047640AAbrasive slurry regulator assemblySPEEDFAM CORP·Filed 1976·Granted Sep 13, 1977·1 cites·4 claims
- 5020US4821459AMultilevel grinding apparatus and methodSPEEDFAM CORP·Filed 1988·Granted Apr 18, 1989·0 cites·7 claims
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