Assignee
SPECIAL MATERIALS RES AND TECH
US·4 granted patents·98 citations·filing 1999–2001
Top patents by PatentIndex Score
4 records- 0185US6613697B1Low metallic impurity SiO based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereofSPECIAL MATERIALS RES AND TECH·Filed 2001·Granted Sep 2, 2003·44 cites·29 claims
- 0272US6593077B2Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrateSPECIAL MATERIALS RES AND TECH·Filed 2001·Granted Jul 15, 2003·17 cites·56 claims
- 0367US6080683ARoom temperature wet chemical growth process of SiO based oxides on siliconSPECIAL MATERIALS RES AND TECH·Filed 1999·Granted Jun 27, 2000·36 cites·21 claims
- 0428US6409889B1Method for the removal and recovery of inorganic pollutants from waste aqueous solutions and waste primary air sourcesSPECIAL MATERIALS RES AND TECH·Filed 1999·Granted Jun 25, 2002·1 cites·10 claims
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