Assignee
SON GIL-SU
KR·0 granted patents·2 pending applications·0 citations·filing 2011–2017
Top patents by PatentIndex Score
2 records- 0137US2017338137A1Methods of evaluating a process and methods of controlling a substrate processing system using the sameSON GIL-SU·Filed 2017·Application pending·0 cites
- 0225US2012098545A1Plasma Diagnostic Apparatus And Method For Controlling The SameSON GIL SU·Filed 2011·Application pending·0 cites
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