Assignee

SOLMICS CO LTD

KR·2 granted patents·0 citations·filing 2022–2023

Technology mixH01J2 H10P2 C04B1 C23C1

Top patents by PatentIndex Score

2 records

0162US12531214B2Manufacturing method of ring-shaped element for etcherSOLMICS CO LTD·Filed 2022·Granted Jan 20, 2026·0 cites·13 claims
0241US12548741B2Focus ring and plasma etching device including sameSOLMICS CO LTD·Filed 2023·Granted Feb 10, 2026·0 cites·15 claims

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