Assignee
SOGARD MICHAEL
US·4 granted patents·3 pending applications·10 citations·filing 2004–2012
Top patents by PatentIndex Score
7 records- 0193US8994918B2Apparatus and methods for measuring thermally induced reticle distortionSOGARD MICHAEL·Filed 2011·Granted Mar 31, 2015·7 cites·17 claims
- 0268US8711335B2Stroboscopic light source for a transmitter of a large scale metrology systemSOGARD MICHAEL·Filed 2012·Granted Apr 29, 2014·2 cites·20 claims
- 0367US8852858B2Methods and devices for hybridization and binding assays using thermophoresisSOGARD MICHAEL·Filed 2007·Granted Oct 7, 2014·1 cites·26 claims
- 0459US8194229B2Dynamic fluid control system for immersion lithographySOGARD MICHAEL·Filed 2008·Granted Jun 5, 2012·0 cites·29 claims
- 0547US2006134683A1Methods and devices for hybridization and binding assays using thermophoresisSOGARD MICHAEL·Filed 2006·Application pending·0 cites
- 0640US2013141735A1Target for large scale metrology systemSOGARD MICHAEL·Filed 2012·Application pending·0 cites
- 0739US2006077361A1Means of removing particles from a membrane mask in a vacuumSOGARD MICHAEL·Filed 2004·Application pending·0 cites
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