Individual holder
SMITH ADLAI H
US·1 granted patent·6 pending applications·0 citations·filing 2005–2010
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
7 records- 0146US8786827B2Method and apparatus for measurement of exit pupil transmittanceSMITH ADLAI H·Filed 2010·Granted Jul 22, 2014·0 cites·13 claims
- 0245US2007024834A1Apparatus and process for determination of dynamic scan field curvatureSMITH ADLAI H·Filed 2006·Application pending·0 cites
- 0337US2006209410A1Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination sourceSMITH ADLAI H·Filed 2006·Application pending·0 cites
- 0436US2006164618A1Method and apparatus for measurement of exit pupil telecentricity and source boresightingSMITH ADLAI H·Filed 2006·Application pending·0 cites
- 0536US2006190915A1Machine specific and machine group correction of masks based on machine subsystem performance parametersSMITH ADLAI H·Filed 2006·Application pending·0 cites
- 0635US2005285056A1Process for manufacture of semiconductor chips utilizing a posteriori corrections to machine control system and settingsSMITH ADLAI H·Filed 2005·Application pending·0 cites
- 0734US2005240895A1Method of emulation of lithographic projection toolsSMITH ADLAI H·Filed 2005·Application pending·0 cites
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